Film Deposition by Plasma Techniques /

This book describes the technology and applications of thin-film deposition by plasma techniques. The properties of thin films depend strongly on the deposition technique and the conditions that are used, with films produced by plasma techniques being superior to those produced by traditional method...

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Bibliographic Details

Main Author:	Konuma, Mitsuharu
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	Berlin, Heidelberg : Springer Berlin Heidelberg, 1992.
Series:	Springer Series on Atoms+Plasmas ; 10.
Subjects:	Physics. Engineering. Electronic books.
Online Access:	Connect to the full text of this electronic book