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Plasma Charging Damage /

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This book provides an in-depth, comprehensive and up-to-date coverage of the subject of plasma charging damage in modern VLSI circuit manufacturing. It is written for beginners as well as practitioners. For beginners, this book presents an easy-to-follow, unified explanation of various charging-dama...

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Bibliographic Details
Main Author: Cheung, Kin P.
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: London : Springer London, 2001.
Subjects:
Engineering.
Machinery.
Electronics.
Optical materials.
Surfaces (Physics)
Electronic books.
Online Access:Connect to the full text of this electronic book
Table of Contents:
  • 1. Thin Gate-oxide Wear-out and Breakdown
  • 2. Mechanism of Plasma Charging Damage I
  • 3. Mechanism of Plasma Charging Damage II
  • 4. Mechanism of Plasma Charging Damage III
  • 5. Charging Damage Measurement I
  • Determination of Plasma's Ability to Cause Damage
  • 6. Charging Damage Measurement II
  • Direct Measurement of Damage
  • 7. Coping with Plasma Charging Damage.