Plasma Charging Damage /

This book provides an in-depth, comprehensive and up-to-date coverage of the subject of plasma charging damage in modern VLSI circuit manufacturing. It is written for beginners as well as practitioners. For beginners, this book presents an easy-to-follow, unified explanation of various charging-dama...

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Bibliographic Details

Main Author:	Cheung, Kin P.
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	London : Springer London, 2001.
Subjects:	Engineering. Machinery. Electronics. Optical materials. Surfaces (Physics) Electronic books.
Online Access:	Connect to the full text of this electronic book