Methodology for the Modeling and Simulation of Microsystems /
Over the past two decades, technologies for microsystems fabrication have made considerable progress. This has made possible a large variety of new commercial devices ranging, for example, from integrated pressure and acceleration microsensors to active micromirror arrays for image projection. In th...
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| Format: | eBook |
| Language: | English |
| Published: |
Boston, MA :
Springer US,
1998.
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| Series: | Microsystems ;
2. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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