Methodology for the Modeling and Simulation of Microsystems /

Over the past two decades, technologies for microsystems fabrication have made considerable progress. This has made possible a large variety of new commercial devices ranging, for example, from integrated pressure and acceleration microsensors to active micromirror arrays for image projection. In th...

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Bibliographic Details

Main Author:	Romanowicz, Bartlomiej F.
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	Boston, MA : Springer US, 1998.
Series:	Microsystems ; 2.
Subjects:	Engineering. Computer engineering. Systems engineering. Electronic books.
Online Access:	Connect to the full text of this electronic book