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Laser Processing of Thin Films and Microstructures : Oxidation, Deposition and Etching of Insulators /

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Bibliographic Details
Main Author: Boyd, Ian W.
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 1987.
Series:Springer series in materials science ; 3.
Subjects:
Physics.
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Item Description:Electronic resource.
Physical Description:1 online resource (viii, 320 pages 77 illustrations)
ISBN:9783642831362 (electronic bk.)
3642831362 (electronic bk.)
ISSN:0933-033X ;