Laser Processing of Thin Films and Microstructures : Oxidation, Deposition and Etching of Insulators /

Bibliographic Details

Main Author:	Boyd, Ian W.
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	Berlin, Heidelberg : Springer Berlin Heidelberg, 1987.
Series:	Springer series in materials science ; 3.
Subjects:	Physics. Electronic books.
Online Access:	Connect to the full text of this electronic book