APA (7th ed.) Citation

Boyd, I. W. (1987). Laser Processing of Thin Films and Microstructures: Oxidation, Deposition and Etching of Insulators. Springer Berlin Heidelberg.

Chicago Style (17th ed.) Citation

Boyd, Ian W. Laser Processing of Thin Films and Microstructures: Oxidation, Deposition and Etching of Insulators. Berlin, Heidelberg: Springer Berlin Heidelberg, 1987.

MLA (9th ed.) Citation

Boyd, Ian W. Laser Processing of Thin Films and Microstructures: Oxidation, Deposition and Etching of Insulators. Springer Berlin Heidelberg, 1987.