Simulation of Semiconductor Devices and Processes : Vol. 5 /

The SISDEP 93 conference proceedings present outstanding research and development results in the area of numerical process and device simulation. The miniaturization of today's semiconductor devices, the usage of new materials and advanced process steps in the development of new semiconductor t...

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Bibliographic Details
Main Author: Selberherr, Siegfried
Corporate Author: SpringerLink (Online service)
Other Authors: Stippel, H. (Hannes), Strasser, Ernst
Format: eBook
Language:English
Published: Vienna : Springer Vienna, 1993.
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Call Number: TK7874-7874.9
 
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