Advances in Rapid Thermal and Integrated Processing /

Rapid thermal and integrated processing is an emerging single-wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level. Three interrelated areas are co...

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Bibliographic Details

Main Author:	Roozeboom, Fred
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	Dordrecht : Springer Netherlands, 1996.
Series:	NATO ASI series. Applied sciences ; 318.
Subjects:	Physics. Optical materials. Surfaces (Physics) Electronic books.
Online Access:	Connect to the full text of this electronic book