Micromachined Ultrasound-Based Proximity Sensors /
Micromachined Ultrasound-Based Proximity Sensors presents a packaged ultrasound microsystem for object detection and distance metering based on micromachined silicon transducer elements. It describes the characterization, optimization and the long-term stability of silicon membrane resonators as wel...
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| Format: | eBook |
| Language: | English |
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Boston, MA :
Springer US,
1999.
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| Series: | Microsystems ;
4. |
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| Online Access: | Connect to the full text of this electronic book |
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