Micromachined Ultrasound-Based Proximity Sensors /

Micromachined Ultrasound-Based Proximity Sensors presents a packaged ultrasound microsystem for object detection and distance metering based on micromachined silicon transducer elements. It describes the characterization, optimization and the long-term stability of silicon membrane resonators as wel...

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Bibliographic Details

Main Author:	Hornung, Mark R.
Corporate Author:	SpringerLink (Online service)
Other Authors:	Brand, Oliver
Format:	eBook
Language:	English
Published:	Boston, MA : Springer US, 1999.
Series:	Microsystems ; 4.
Subjects:	Engineering. Computer engineering. Optical materials. Electronic books.
Online Access:	Connect to the full text of this electronic book