Micromachined Ultrasound-Based Proximity Sensors /
Micromachined Ultrasound-Based Proximity Sensors presents a packaged ultrasound microsystem for object detection and distance metering based on micromachined silicon transducer elements. It describes the characterization, optimization and the long-term stability of silicon membrane resonators as wel...
| Main Author: | Hornung, Mark R. |
|---|---|
| Corporate Author: | SpringerLink (Online service) |
| Other Authors: | Brand, Oliver |
| Format: | eBook |
| Language: | English |
| Published: |
Boston, MA :
Springer US,
1999.
|
| Series: | Microsystems ;
4. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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