Silicon-on-Insulator Technology: Materials to VLSI /

Silicon-on-Insulator Technology: Materials to VLSI, Third Edition, retraces the evolution of SOI materials, devices and circuits over a period of roughly twenty years. Twenty years of progress, research and development during which SOI material fabrication techniques have been born and abandoned, de...

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Bibliographic Details

Main Author:	Colinge, Jean-Pierre
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	Boston, MA : Springer US, 2004.
Edition:	3rd edition.
Subjects:	Engineering. Chemistry. Computer engineering. Electronics. Systems engineering. Optical materials. Electronic books.
Online Access:	Connect to the full text of this electronic book