Metal Impurities in Silicon-Device Fabrication /
Metal Impurities in Silicon-Device Fabrication treats the transition-metal impurities generated during silicon sample and device fabrication. The different mechanisms responsible for contamination are discussed, and a survey given of their impact on device performance. The specific properties of mai...
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| Format: | eBook |
| Language: | English |
| Published: |
Berlin, Heidelberg :
Springer Berlin Heidelberg,
1995.
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| Series: | Springer series in materials science ;
24. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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