Metal Impurities in Silicon-Device Fabrication /

Metal Impurities in Silicon-Device Fabrication treats the transition-metal impurities generated during silicon sample and device fabrication. The different mechanisms responsible for contamination are discussed, and a survey given of their impact on device performance. The specific properties of mai...

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Bibliographic Details

Main Author:	Graff, Klaus
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	Berlin, Heidelberg : Springer Berlin Heidelberg, 1995.
Series:	Springer series in materials science ; 24.
Subjects:	Chemistry, Inorganic. Electronics. Surfaces (Physics) Electronic books.
Online Access:	Connect to the full text of this electronic book