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Metal Impurities in Silicon-Device Fabrication /

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Metal Impurities in Silicon-Device Fabrication treats the transition-metal impurities generated during silicon sample and device fabrication. The different mechanisms responsible for contamination are discussed, and a survey given of their impact on device performance. The specific properties of mai...

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Bibliographic Details
Main Author: Graff, Klaus
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 1995.
Series:Springer series in materials science ; 24.
Subjects:
Chemistry, Inorganic.
Electronics.
Surfaces (Physics)
Electronic books.
Online Access:Connect to the full text of this electronic book

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