APA (7th ed.) Citation

Graff, K. (1995). Metal Impurities in Silicon-Device Fabrication. Springer Berlin Heidelberg.

Chicago Style (17th ed.) Citation

Graff, Klaus. Metal Impurities in Silicon-Device Fabrication. Berlin, Heidelberg: Springer Berlin Heidelberg, 1995.

MLA (9th ed.) Citation

Graff, Klaus. Metal Impurities in Silicon-Device Fabrication. Springer Berlin Heidelberg, 1995.

Warning: These citations may not always be 100% accurate.