Electron Beam Testing Technology /

This is the first comprehensive volume on electron beam testing for integrated circuits. Including introductory material, a guide to fundamentals, and an implementational section, the work will serve as a complete reference for both experienced practitioners as well as those unfamiliar with the tech...

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Bibliographic Details

Main Author:	Thong, John T. L.
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	Boston, MA : Springer US : Imprint: Springer, 1993.
Series:	Microdevices, Physics and Fabrication Technologies.
Subjects:	Physics. Crystallography. Computer engineering. Optical materials. Solid State Physics. Spectroscopy and Microscopy. Condensed Matter Physics. Electrical engineering. Optical and Electronic Materials. Electronic books.
Online Access:	Connect to the full text of this electronic book