Optimal Synthesis Methods for MEMS /
This book is a first ever collection of optimization-based synthesis methods for MEMS. Various chapters written by leading researchers in the field cover a variety of MEMS devices and actuation principles including mechanical, electrostatic, electro-thermal, and piezoelectric. Process, mask, and sys...
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| Format: | eBook |
| Language: | English |
| Published: |
Boston, MA :
Springer US,
2003.
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| Series: | Kluwer international series in microsystems ;
13. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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