Optimal Synthesis Methods for MEMS /

This book is a first ever collection of optimization-based synthesis methods for MEMS. Various chapters written by leading researchers in the field cover a variety of MEMS devices and actuation principles including mechanical, electrostatic, electro-thermal, and piezoelectric. Process, mask, and sys...

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Bibliographic Details

Main Author:	Ananthasuresh, G. K.
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	Boston, MA : Springer US, 2003.
Series:	Kluwer international series in microsystems ; 13.
Subjects:	Engineering. Mechanical engineering. Engineering design. Electronic books.
Online Access:	Connect to the full text of this electronic book