Optimal Synthesis Methods for MEMS /
This book is a first ever collection of optimization-based synthesis methods for MEMS. Various chapters written by leading researchers in the field cover a variety of MEMS devices and actuation principles including mechanical, electrostatic, electro-thermal, and piezoelectric. Process, mask, and sys...
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| Format: | eBook |
| Language: | English |
| Published: |
Boston, MA :
Springer US,
2003.
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| Series: | Kluwer international series in microsystems ;
13. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Summary: | This book is a first ever collection of optimization-based synthesis methods for MEMS. Various chapters written by leading researchers in the field cover a variety of MEMS devices and actuation principles including mechanical, electrostatic, electro-thermal, and piezoelectric. Process, mask, and system-level syntheses are also addressed. Sufficient background material, algorithms, and details of implementation of the optimization procedures are included to facilitate application to practical problems by MEMS engineers and researchers as well as students. This timely book underscores the importance of synthesis in designing MEMS efficiently and economically. |
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| Item Description: | Electronic resource. |
| Physical Description: | 1 online resource (336 pages) |
| ISBN: | 9781461504870 (electronic bk.) 1461504872 (electronic bk.) |
| ISSN: | 1389-2134 ; |