Intrinsic Point Defects, Impurities, and Their Diffusion in Silicon /

Basically all properties of semiconductor devices are influenced by the distribution of point defects in their active areas. This book contains the first comprehensive review of the properties of intrinsic point defects, acceptor and donor impurities, isovalent atoms, chalcogens, and halogens in sil...

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Bibliographic Details

Main Author:	Pichler, P. (Peter)
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	Vienna : Springer Vienna, 2004.
Series:	Computational microelectronics.
Subjects:	Engineering. Electronics. Optical materials. Electronic books.
Online Access:	Connect to the full text of this electronic book