CMOS Cantilever Sensor Systems : Atomic Force Microscopy and Gas Sensing Applications /
This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of physical quantities su...
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| Format: | eBook |
| Language: | English |
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Berlin, Heidelberg :
Springer Berlin Heidelberg,
2002.
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| Series: | Microtechnology and MEMS.
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| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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