CMOS Cantilever Sensor Systems : Atomic Force Microscopy and Gas Sensing Applications /

This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of physical quantities su...

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Bibliographic Details

Main Author:	Lange, D.
Corporate Author:	SpringerLink (Online service)
Other Authors:	Brand, O., Baltes, H.
Format:	eBook
Language:	English
Published:	Berlin, Heidelberg : Springer Berlin Heidelberg, 2002.
Series:	Microtechnology and MEMS.
Subjects:	Engineering. Nanotechnology. Electronic books.
Online Access:	Connect to the full text of this electronic book