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CMOS Cantilever Sensor Systems : Atomic Force Microscopy and Gas Sensing Applications /

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This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of physical quantities su...

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Bibliographic Details
Main Author: Lange, D.
Corporate Author: SpringerLink (Online service)
Other Authors: Brand, O., Baltes, H.
Format: eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 2002.
Series:Microtechnology and MEMS.
Subjects:
Engineering.
Nanotechnology.
Electronic books.
Online Access:Connect to the full text of this electronic book

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