Progress in SOI structures and devices operating at extreme conditions /
A review of the electrical properties, performance and physical mechanisms of the main silicon-on-insulator (SOI) materials and devices. Particular attention is paid to the reliability of SOI structures operating in harsh conditions. The first part of the book deals with material technology and desc...
| Corporate Authors: | , |
|---|---|
| Other Authors: | , , |
| Format: | Conference Proceeding eBook |
| Language: | English |
| Published: |
Dordrecht :
Springer-Science+Business Media,
2002.
|
| Series: | NATO science series. Mathematics, physics, and chemistry ;
58. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
Search Result 1
Published 2002
Conference Proceeding
Book