Progress in SOI structures and devices operating at extreme conditions /
A review of the electrical properties, performance and physical mechanisms of the main silicon-on-insulator (SOI) materials and devices. Particular attention is paid to the reliability of SOI structures operating in harsh conditions. The first part of the book deals with material technology and desc...
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Bibliographic Details
| Corporate Authors: |
NATO Advanced Research Workshop on Progress in SOI Structures and Devices Operating at Extreme Conditions Kyiv, Ukraine,
SpringerLink (Online service) |
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| Other Authors: |
Balestra, F. (Ferruccio),
Nazarov, A.,
Lysenko, V. S. (Vladimir S.) |
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| Format: | Conference Proceeding
eBook
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| Language: | English |
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| Published: |
Dordrecht :
Springer-Science+Business Media,
2002.
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| Series: | NATO science series. Mathematics, physics, and chemistry ;
58.
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| Subjects: | |
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| Online Access: | Connect to the full text of this electronic book
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