High Resolution Focused Ion Beams: FIB and its Applications : the Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology /

In this book, we have attempted to produce a reference on high resolution focused ion beams (FIBs) that will be useful for both the user and the designer of FIB instrumentation. We have included a mix of theory and applications that seemed most useful to us. The field of FIBs has advanced rapidly si...

Full description

Bibliographic Details

Main Author:	Orloff, Jon
Corporate Author:	SpringerLink (Online service)
Other Authors:	Utlaut, Mark, Swanson, Lynwood
Format:	eBook
Language:	English
Published:	Boston, MA : Springer US : Imprint : Springer, 2003.
Subjects:	Focused ion beams > Industrial applications. Ion bombardment > Industrial applications. Electronic books.
Online Access:	Connect to the full text of this electronic book