Handbook of Advanced Plasma Processing Techniques /

This volume covers the topic of advanced plasma processing techniques, from the fundamental physics of plasmas to diagnostics, modeling and applications such as etching and deposition for microelectronics. The use of plasmas for patterning on a submicron scale has enabled successive generations of c...

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Bibliographic Details

Main Author:	Shul, Randy J.
Corporate Author:	SpringerLink (Online service)
Other Authors:	Pearton, S. J.
Format:	eBook
Language:	English
Published:	Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint : Springer, 2000.
Subjects:	Engineering. Structural control (Engineering) Optical materials. Surfaces (Physics) Electronic books.
Online Access:	Connect to the full text of this electronic book