Pulsed and pulsed bias sputtering : principles and applications /

This book provides basic knowledge on the design of the instrumentation for pulsed and pulsed bias sputtering techniques as well as the knowledge for the control of thin film properties using the deposition parameters such as pulsing cycle and duty. The book focuses on the basic principles and exper...

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Bibliographic Details

Main Author:	Barnat, Edward V.
Corporate Author:	SpringerLink (Online service)
Other Authors:	Lu, T.-M. (Toh-Ming), 1943-
Format:	eBook
Language:	English
Published:	Boston : Kluwer Academic, [2003]
Subjects:	Cathode sputtering (Plating process) Thin films. Pulvérisation cathodique > Applications industrielles. Couches minces. Electronic books.
Online Access:	Connect to the full text of this electronic book