Ion implantation : basics to device fabrication /
Ion Implantation: Basics to Device Fabrication is a collection of research dealing with several aspects of ion implantation, including basic information on the physics of devices, ion implanters, channeling implants, yield, damage and its annealing, in addition to a host of other topics. Particular...
| Main Author: | |
|---|---|
| Corporate Author: | |
| Format: | eBook |
| Language: | English |
| Published: |
Boston :
Kluwer Academic Publishers,
[1995]
|
| Series: | Kluwer international series in engineering and computer science ;
SECS 293. Kluwer international series in engineering and computer science. Electronic materials, science and technology. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
Search Result 1
