Ion implantation : basics to device fabrication /

Ion Implantation: Basics to Device Fabrication is a collection of research dealing with several aspects of ion implantation, including basic information on the physics of devices, ion implanters, channeling implants, yield, damage and its annealing, in addition to a host of other topics. Particular...

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Bibliographic Details

Main Author:	Rimini, E.
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	Boston : Kluwer Academic Publishers, [1995]
Series:	Kluwer international series in engineering and computer science ; SECS 293. Kluwer international series in engineering and computer science. Electronic materials, science and technology.
Subjects:	Ion implantation. Semiconductor doping. Semiconductors > Design and construction. Ionenimplantation. Electronic books.
Online Access:	Connect to the full text of this electronic book