Electrical characterization of silicon-on-insulator materials and devices /
Electrical Characterization of Silicon-on-Insulator Materials and Devices describes a wide variety of electrical characterization methods, from wafer screening and defect identification to detailed device evaluation. Each technique comes with pertinent technical information -- experimental set-up, b...
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| Format: | eBook |
| Language: | English |
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Boston :
Kluwer Academic,
[1995]
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| Series: | Kluwer international series in engineering and computer science ;
SECS 305. |
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| Online Access: | Connect to the full text of this electronic book |
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