Electrical characterization of silicon-on-insulator materials and devices /

Electrical Characterization of Silicon-on-Insulator Materials and Devices describes a wide variety of electrical characterization methods, from wafer screening and defect identification to detailed device evaluation. Each technique comes with pertinent technical information -- experimental set-up, b...

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Bibliographic Details

Main Author:	Cristoloveanu, Sorin
Corporate Author:	SpringerLink (Online service)
Other Authors:	Li, Sheng S., 1938-
Format:	eBook
Language:	English
Published:	Boston : Kluwer Academic, [1995]
Series:	Kluwer international series in engineering and computer science ; SECS 305.
Subjects:	Semiconductors > Design and construction. Silicon-on-insulator technology. Semiconductors > Electric properties. Circuitos integrados. Semicondutores. Semiconducteurs > Conception et construction. Technologie silicium sur isolant. Semiconducteurs > Propriétés électriques. SOI-Technik. Electronic books.
Online Access:	Connect to the full text of this electronic book