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Electrical characterization of silicon-on-insulator materials and devices /

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Electrical Characterization of Silicon-on-Insulator Materials and Devices describes a wide variety of electrical characterization methods, from wafer screening and defect identification to detailed device evaluation. Each technique comes with pertinent technical information -- experimental set-up, b...

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Bibliographic Details
Main Author: Cristoloveanu, Sorin
Corporate Author: SpringerLink (Online service)
Other Authors: Li, Sheng S., 1938-
Format: eBook
Language:English
Published: Boston : Kluwer Academic, [1995]
Series:Kluwer international series in engineering and computer science ; SECS 305.
Subjects:
Semiconductors > Design and construction.
Silicon-on-insulator technology.
Semiconductors > Electric properties.
Circuitos integrados.
Semicondutores.
Semiconducteurs > Conception et construction.
Technologie silicium sur isolant.
Semiconducteurs > Propriétés électriques.
SOI-Technik.
Electronic books.
Online Access:Connect to the full text of this electronic book

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