Cover Image

Lecture Notes on Principles of Plasma Processing /

Show other versions (1)

Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts...

Full description

Bibliographic Details
Main Author: Chen, Francis F.
Corporate Author: SpringerLink (Online service)
Other Authors: Chang, Jane P.
Format: eBook
Language:English
Published: Boston, MA : Springer US, 2003.
Subjects:
Physics.
Chemical engineering.
Nuclear physics.
Optical materials.
Electronic books.
Online Access:Connect to the full text of this electronic book
Table of Contents:
  • Preface
  • Part A1: Introduction to Plasma Science
  • Part A2: Introduction to Gas Discharges
  • Part A3: Plasma Sources I
  • Part A4: Plasma Sources II
  • Part A5: Plasma Sources III
  • Part A6: Plasma Sources IV
  • Part A7: Plasma Diagnostics
  • Part B1: Overview of Plasma Processing in Microelectronics Fabrication
  • Part B2: Kinetic Theory and Collisions
  • Part B3: Atomic Collisions and Spectra
  • Part B4: Molecular Collisions and Spectra
  • Part B5: Plasma Diagnostics
  • Part B6: Plasma Surface Kinetics.-Part B7: Feature Evolution and Modeling.-Epilogue: Current Problems in Semiconductor Processing.