Lecture Notes on Principles of Plasma Processing /

Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts...

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Bibliographic Details

Main Author:	Chen, Francis F.
Corporate Author:	SpringerLink (Online service)
Other Authors:	Chang, Jane P.
Format:	eBook
Language:	English
Published:	Boston, MA : Springer US, 2003.
Subjects:	Physics. Chemical engineering. Nuclear physics. Optical materials. Electronic books.
Online Access:	Connect to the full text of this electronic book