APA (7th ed.) Citation

Chen, F. F., & Chang, J. P. (2003). Lecture Notes on Principles of Plasma Processing. Springer US.

Chicago Style (17th ed.) Citation

Chen, Francis F., and Jane P. Chang. Lecture Notes on Principles of Plasma Processing. Boston, MA: Springer US, 2003.

MLA (9th ed.) Citation

Chen, Francis F., and Jane P. Chang. Lecture Notes on Principles of Plasma Processing. Springer US, 2003.