Micromachines as Tools for Nanotechnology /
This book addresses the use of MEMS and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology. Such micromachined tools for nanotechnology can enhance the sensitivity, spatial resolution, dexterity, selectivity, and parallel processing capability in meas...
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| Format: | eBook |
| Language: | English |
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Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint : Springer,
2003.
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| Series: | Microtechnology and MEMS.
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| Online Access: | Connect to the full text of this electronic book |
| Summary: | This book addresses the use of MEMS and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology. Such micromachined tools for nanotechnology can enhance the sensitivity, spatial resolution, dexterity, selectivity, and parallel processing capability in measuring and manipulating nano-objects. The book covers state-of-the-art MEMS and NEMS devices for DNA molecular handling and analysis, cell handling and culture on a chip, chemical lab-on-a-chip, multi-probes for vacuum tunneling microscopy and AFM, and characterization of quantum semiconductor structures. Readers will gain deep insight into such developments and students will learn about the emerging field of MEMS and nanotechnology. |
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| Item Description: | Electronic resource. |
| Physical Description: | 1 online resource (XII, 212 pages 183 illustrations) |
| ISBN: | 9783642555039 (electronic bk.) 3642555039 (electronic bk.) |