Micromachines as Tools for Nanotechnology /

This book addresses the use of MEMS and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology. Such micromachined tools for nanotechnology can enhance the sensitivity, spatial resolution, dexterity, selectivity, and parallel processing capability in meas...

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Bibliographic Details

Main Author:	Fujita, Hiroyuki
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint : Springer, 2003.
Series:	Microtechnology and MEMS.
Subjects:	Engineering. Structural control (Engineering) Electronics. Nanotechnology. Electronic books.
Online Access:	Connect to the full text of this electronic book