Principles of Chemical Vapor Deposition /
Principles of Chemical Vapor Deposition provides a simple introduction to heat and mass transfer, surface and gas phase chemistry, and plasma discharge characteristics. In addition, the book includes discussions of practical films and reactors to help in the development of better processes and equip...
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| Format: | eBook |
| Language: | English |
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Dordrecht :
Springer Netherlands,
2003.
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| Online Access: | Connect to the full text of this electronic book |
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