Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies /

An up-to-date collection of tutorial papers on the latest advances in the deposition and growth of thin films for micro and nano technologies. The emphasis is on fundamental aspects, principles and applications of deposition techniques used for the fabrication of micro and nano devices. The depositi...

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Bibliographic Details

Main Author:	Pauleau, Y.
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	Dordrecht : Springer Netherlands : Imprint : Springer, 2002.
Series:	NATO science series. Mathematics, physics, and chemistry ; 55.
Subjects:	Thin films > Congresses. Nanotechnology > Congresses. Nanotechnology. Thin films. Electronic books. Conference proceedings.
Online Access:	Connect to the full text of this electronic book