Scanning electron microscopy : physics of image formation and microanalysis /
Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interations. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling...
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| Format: | eBook |
| Language: | English |
| Published: |
Berlin ; New York :
Springer,
[1998]
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| Edition: | Second completely revised and updated edition. |
| Series: | Springer series in optical sciences ;
v. 45. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Summary: | Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interations. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information. |
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| Physical Description: | 1 online resource (xiv, 527 pages) : illustrations. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9783540389675 (electronic bk.) 3540389679 (electronic bk.) 9783642083723 (print) 3642083722 (print) |