NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies /
Success in the fabrication of structures at the nanometer length scale has opened up a new horizon to condensed matter physics: the study of quantum phenomena in confined boxes, wires, rings, etc. A new class of electronic devices based on this physics has been proposed, with the promise of a new fu...
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| Format: | eBook |
| Language: | English |
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Dordrecht :
Springer Netherlands,
1994.
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| Series: | NATO ASI series. Applied sciences ;
264. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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Published 1994
Conference Proceeding
Book