NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies /

Success in the fabrication of structures at the nanometer length scale has opened up a new horizon to condensed matter physics: the study of quantum phenomena in confined boxes, wires, rings, etc. A new class of electronic devices based on this physics has been proposed, with the promise of a new fu...

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Bibliographic Details

Main Author:	Gentili, M.
Corporate Author:	SpringerLink (Online service)
Other Authors:	Giovannella, C., Selci, S.
Format:	eBook
Language:	English
Published:	Dordrecht : Springer Netherlands, 1994.
Series:	NATO ASI series. Applied sciences ; 264.
Subjects:	Physics. Computer engineering. Surfaces (Physics) Electronic books.
Online Access:	Connect to the full text of this electronic book