NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies /
Success in the fabrication of structures at the nanometer length scale has opened up a new horizon to condensed matter physics: the study of quantum phenomena in confined boxes, wires, rings, etc. A new class of electronic devices based on this physics has been proposed, with the promise of a new fu...
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| Format: | eBook |
| Language: | English |
| Published: |
Dordrecht :
Springer Netherlands,
1994.
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| Series: | NATO ASI series. Applied sciences ;
264. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Summary: | Success in the fabrication of structures at the nanometer length scale has opened up a new horizon to condensed matter physics: the study of quantum phenomena in confined boxes, wires, rings, etc. A new class of electronic devices based on this physics has been proposed, with the promise of a new functionality for ultrafast and/or ultradense electronic circuits. Such applications demand highly sophisticated fabrication techniques, the crucial one being lithography. Nanolithography contains updated reviews by major experts on the well established techniques -- electron beam lithography (EBL), X-ray lithography (XRL), ion beam lithography (IBL) -- as well as on emergent techniques, such as scanning tunnelling lithography (STL). |
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| Item Description: | Electronic resource. |
| Physical Description: | 1 online resource (xii, 215 pages) |
| ISBN: | 9789401582612 (electronic bk.) 9401582610 (electronic bk.) |
| ISSN: | 0168-132X ; |