Tribology Issues and Opportunities in MEMS : Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS held in Columbus, Ohio, U.S.A., 9-11 November 1997 /

This volume contains the Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS, held in Columbus, Ohio, USA, 9-11 November, 1997. Micro Electro Mechanical Systems (MEMS) is a rapidly growing industry. So far major emphasis has been placed on the fabrication process...

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Bibliographic Details

Main Author:	Bhushan, Bharat
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	Dordrecht : Springer Netherlands, 1998.
Subjects:	Tribology > Congresses. Tribology. Electronic books. Conference proceedings.
Online Access:	Connect to the full text of this electronic book