APA (7th ed.) Citation

Garfunkel, E., Gusev, E., & Vul', A. (1998). Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices. Springer Netherlands : Imprint : Springer.

Chicago Style (17th ed.) Citation

Garfunkel, Eric, Evgeni Gusev, and Alexander Vul'. Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices. Dordrecht: Springer Netherlands : Imprint : Springer, 1998.

MLA (9th ed.) Citation

Garfunkel, Eric, et al. Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices. Springer Netherlands : Imprint : Springer, 1998.