Microelectronic Materials and Processes /

Bibliographic Details

Main Author:	Levy, R. A.
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	Dordrecht : Springer Netherlands, 1989.
Series:	NATO ASI series. Applied sciences ; 164.
Subjects:	Optical materials. Surfaces (Physics) Electronic books.
Online Access:	Connect to the full text of this electronic book